Thanks for the hint. I works now.
I saw no erros but used some plugins. I removed all and modeler worked well.
I added than one after the other and the problem was token simulator plugin.
I removed it from my plugins . I really do not need it.
Now everything works fine.
Older versions of bpmn-js-token-simulation-plugin are not compatible with Camunda Modeler v2.2.0 and above. Make sure you’re using the latest version of the plugin (v0.8.0). Sorry for the inconveniences.